Apparatus and method for inspecting loading state of wafers in c

Details Apparatus and method for inspecting loading state of wafers in c Apparatus and method for inspecting loading state of wafers in c

1998-07-15

2000-04-18

Font, Frank G.

Optics: measuring and testing

By configuration comparison

2505594, G01B 1100

Patent

active

060521937

ABSTRACT:
A wafer loading-state inspection apparatus includes a transmissive wafer sensor including a light emitter and a light detector. The light emitter is spaced apart from the light detector in a horizontal plane by a predetermined separation distance. The wafer sensor generates wafer pulses indicating whether a wafer is detected between the light emitter and the light detector. A wafer sensor support has a first arm connected to the light emitter and a second arm connected to the light detector. A vertically oriented post is connected to the wafer sensor support at one end. Connected at the other end of the post is a driving mechanism which produces a reciprocating vertical movement of the post over a vertical range.

REFERENCES:
patent: 4987407 (1991-01-01), Lee
patent: 5177564 (1993-01-01), Kato et al.
patent: 5350899 (1994-09-01), Ishikawa et al.

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