Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Reexamination Certificate
2008-06-03
2008-06-03
Wilson, Gregory (Department: 3749)
Heating
Heating or heat retaining work chamber structure
Including baffle wall, work shield, or work support element
C118S724000
Reexamination Certificate
active
07381052
ABSTRACT:
An apparatus for processing substrates is disclosed. In one embodiment, the apparatus includes a housing and a plurality of stacked cell structures in the housing. An actuator is adapted to move the plurality of stacked cell structures inside of the housing while substrates in the stacked cell structures are being heated.
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Yoo et al., “Low-temperature annealing system for 300mm thermal processing,” Solid State Technology, Jun. 2001, pp. 152-160.
Maydan Dan
Moghadam Farhad
Quach David
Roberts Rick J.
Weidman Timothy
Applied Materials Inc.
Townsend and Townsend and Crew
Wilson Gregory
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