Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2006-07-11
2006-07-11
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C427S551000, C427S481000, C427S484000, C427S485000, C427S560000, C430S330000
Reexamination Certificate
active
07074548
ABSTRACT:
A method of forming a thin-film including a capability to remove contaminants from the formed thin-film and/or a substrate on which the thin-film is formed using alcohol. The method includes allowing a substrate holder to support a substract. A first mixture is produced by mixing a condensation polymer containing an element of metal oxide compound and alcohol. Then second mixture is produced by mixing supercritical fluid or liquid carbon dioxide and the first mixture. A thin film is formed by applying the second mixture on a surface of the substrate. After forming the thin-film, the substrate is cleaned by applying alcohol to upper and lower surfaces, preferably the whole upper and lower surfaces, of the substract. The thin-film is crystallized by heating, and the crystallizing may include applying oxygen in a crystallizing chamber. Soft X-rays may be applied to the substrate, during the forming of the thin-film on the surface of the substrate.
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patent: 6806183 (2004-10-01), Kang et al.
patent: 2003/0020157 (2003-01-01), Natori et al.
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Kijima Takeshi
Natori Eiji
Suzuki Mitsuhiro
Chacko-Davis Daborah
McPherson John A.
Oliff & Berridg,e PLC
Seiko Epson Corporation
Youtec Co., Ltd.
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