Apparatus and method for forming die sites in a high density ele

Details Apparatus and method for forming die sites in a high density ele Apparatus and method for forming die sites in a high density ele

1989-06-26

1990-07-10

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156655, 156668, 156345, 21912168, 21912169, 21912185, B44C 122, B23K 2600, B29C 3700

Patent

active

049405080

ABSTRACT:
The present invention is directed to a system for removing material from a structure. The system includes an excimer laser for removing material by ablative photodecomposition and means for increasing the energy density of the laser beam. The system further includes an aperture structure having a plurality of openings of different sizes and shapes. At least one of these openings may be selectively positioned in the laser beam. Additionally, the system includes a stage for supporting the structure wherein the stage is moveable in at least the x and y directions.

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