Semiconductor device manufacturing: process – Having integral power source
Reexamination Certificate
2006-05-16
2006-05-16
Tsai, H. Jey (Department: 2812)
Semiconductor device manufacturing: process
Having integral power source
C438S618000, C438S624000
Reexamination Certificate
active
07045372
ABSTRACT:
A method and structure that provides a battery within an integrated circuit for providing voltage to low-current electronic devices that exist within the integrated circuit. The method includes Front-End-Of-Line (FEOL) processing for generating a layer of electronic devices on a semiconductor wafer, followed by Back-End-Of-Line (BEOL) integration for wires connecting the electronic devices together to form completed electrical circuits of the integrated circuit. The BEOL integration includes forming a multilayered structure of wiring levels on the layer of electronic devices. Each wiring level includes conductive metallization (e.g., metal-plated vias, conductive wiring lines, etc.) embedded in insulative material. The battery is formed during BEOL integration within one or more wiring levels, and the conductive metallization conductively couples positive and negative terminals of the battery to the electronic devices. The battery may have several different topologies relative to the structural and geometrical relationships among the battery electrodes and electrolyte. Multiple batteries may be formed within one or more wiring levels, and may be conductively coupled to the electronic devices. The multiple batteries may be connected in series or in parallel.
REFERENCES:
patent: 4789648 (1988-12-01), Chow et al.
patent: 4878094 (1989-10-01), Balkanski
patent: 5308720 (1994-05-01), Kurokawa et al.
patent: 5338625 (1994-08-01), Bates et al.
patent: 5455126 (1995-10-01), Bates et al.
patent: 5512147 (1996-04-01), Bates et al.
patent: 5561004 (1996-10-01), Bates et al.
patent: 5567210 (1996-10-01), Bates et al.
patent: 5705293 (1998-01-01), Hobson
patent: 5759911 (1998-06-01), Cronin et al.
patent: 5864182 (1999-01-01), Matsuzaki
patent: 5960254 (1999-09-01), Cronin
patent: 5965459 (1999-10-01), Beyer
patent: 5976928 (1999-11-01), Kirlin et al.
patent: 6264709 (2001-07-01), Yoon et al.
patent: 6610440 (2003-08-01), LaFollette et al.
patent: 6924164 (2005-08-01), Jenson
patent: 2001/0000744 (2001-05-01), Wolk et al.
patent: 2000188113 (2000-07-01), None
Lee et al., “All-Solid-State Rocking Chair Lithium Battery on a Flexible Al Substrate,”; Electrochemical and Solid State Letters V2 N9 Sep. 1999 p. 425-427.
Park et al., “All-Solid-State Lithium Thin-Film Rechargeable Battery With Lithium Manganese Oxide,”; Electrochemical and Solid State Letters V2 N2 Feb. 1999 p. 58-59.
T.A. Kuku, “ION Transport Studies on Vacuum Deposited PbSnI4 Thin Films,”; Thin Solid Films V 340 N1 1999 p. 292-296.
Gregor, L.V., “Thin Film Voltage Source,”; IBM Technical Disclosure Bulletin, Nov. 1964, p. 433.
Ballantine Arne W.
Groves Robert A.
Lund Jennifer L.
Nakos James S.
Rice Michael B.
Schmeiser Olsen & Watts
Steinberg William H.
Tsai H. Jey
LandOfFree
Apparatus and method for forming a battery in an integrated... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for forming a battery in an integrated..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for forming a battery in an integrated... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3529596