Apparatus and method for E-beam dark field imaging

Details Apparatus and method for E-beam dark field imaging Apparatus and method for E-beam dark field imaging

2006-11-28

2006-11-28

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

Reexamination Certificate

active

07141791

ABSTRACT:
One embodiment disclosed relates to a scanning electron beam apparatus including an objective lens, scan deflectors, de-scan deflectors, an energy-filter drift tube, and a segmented detector. The objective lens may be an immersion lens configured with a high extraction field so as to preserve azimuthal angle discrimination of the electrons scattered from the specimen surface. The de-scan deflectors may be used to compensate for the scanning of the incident electron beam. The energy-filter drift tube is configured to align the scattered electrons according to polar angles of trajectory from the specimen surface.

REFERENCES:
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patent: 5644132 (1997-07-01), Litman et al.
patent: 6407373 (2002-06-01), Dotan
patent: 6667476 (2003-12-01), Todokoro et al.
patent: 6872944 (2005-03-01), Todokoro et al.
patent: 6885001 (2005-04-01), Ose et al.

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