4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron microscope type

Jeffrey Keister

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Apparatus and method for E-beam dark field imaging

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Wien filter with reduced chromatic aberration

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Profile ID: LFUS-PAI-P-2993923

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