Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1997-12-19
2000-11-21
Font, Frank G.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
356432, G01B 1106, G01N 2100
Patent
active
061511196
ABSTRACT:
An apparatus and method for the determination of a depth profile and/or one or more depth profile characteristics of a dopant material in a semiconductor device includes a light source which can illuminate the device at two or more illumination wavelengths, a detector that receives scattered light from the semiconductor device and determines an intensity characteristic for one or more Raman spectral lines attributable to the presence of the dopant material in the semiconductor device. The intensity characteristics of the Raman spectral lines can then be used to determine the depth profile or depth profile characteristics using profile constants measured from known samples at each of the illumination wavelengths. This apparatus and method can be used in-line because it is noninvasive, relatively quick, and nondestructive.
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Campion Alan
Hossain Tim Z.
May Charles E.
Advanced Micro Devices
Font Frank G.
Smith Zandra V.
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