Apparatus and method for control of melt flow pattern in a cryst

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156601, 1566171, 1566181, 422246, 422249, C30B 1500

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active

051620723

ABSTRACT:
An apparatus and method for control of a shape of a solidification interface in a Czochralski crystal pulling process are provided wherein a bottom heater is disposed below the bottom of the crucible, the bottom heater having a plurality of individually controllable heating elements which are selectively controlled to produce a desired radial temperature distribution across the bottom of the crucible, thereby influencing the flow pattern within the melt.

REFERENCES:
patent: 4133969 (1979-01-01), Zumbrunnen
patent: 4233270 (1987-11-01), Schmidt
patent: 4239583 (1980-12-01), Hatch et al.
patent: 4350557 (1982-09-01), Scholl et al.
patent: 4478676 (1984-10-01), Belt et al.
patent: 4654110 (1987-03-01), Morrison
patent: 4659421 (1987-04-01), Jewett
patent: 4687646 (1987-08-01), Matgeika et al.
patent: 4734267 (1988-03-01), Kojima
patent: 4830703 (1989-05-01), Matsutani
Automatic Czochralski Growth, Growth Parameter Measurements and Process Control; Uelhoff; pp. 278-279; Journal of Crystal Growth 65 (1985).

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