Apparatus and method for analyzing microscopic area

Details Apparatus and method for analyzing microscopic area Apparatus and method for analyzing microscopic area

1997-11-05

2000-05-09

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250307, 250305, H01J 37295

Patent

active

060607076

ABSTRACT:
A primary electron beam applied to a thinned sample excites Auger electrons on a surface of the thinned sample, and most of the primary electron beam is transmitted by the thinned sample, scattering and reflection are restrained and an Auger electron generation area is micrified. A primary electron beam transmitted by the thinned sample passes through a hole and is directed to a Faraday cup disposed immediately below the sample. The primary electron beam entering the Faraday cup is scattered and reflected within the Faraday cup and effectively absorbed and captured by the Faraday cup. By maintaining the potential of the Faraday cup at a ground potential during the analysis, stable data are obtained.

REFERENCES:
patent: 4117323 (1978-09-01), Greer et al.
patent: 4438332 (1984-03-01), Lichtenegger
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 5656811 (1997-08-01), Itoh et al.

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