Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1997-11-07
2000-03-07
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430326, 430330, 430311, G03F 738, G03F 711
Patent
active
06033830&
ABSTRACT:
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
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Adams Timothy G.
Mori James Michael
Sinta Roger F.
Cairns S. Matthew
Corless Peter F.
Frickey Darryl P.
Hamilton Cynthia
Shipley Company L.L.C.
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