Anti-contamination diaphragm for an electron beam apparatus

Details Anti-contamination diaphragm for an electron beam apparatus Anti-contamination diaphragm for an electron beam apparatus

1980-08-25

1982-09-28

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2505031, 2505051, G01N 2300

Patent

active

043520154

ABSTRACT:
In order to reduce object contamination during the examination or machining of the object in an electron beam apparatus, an anti-contamination diaphragm is provided in place of the customary diaphragm. The anti-contamination diaphragm has a central aperture which corresponds to a customary diaphragm aperture, and a concentric annular aperture for transmitting a non-paraxial hollow beam which irradiates a ring around the paraxial focus on the object. The conical hollow anti-contamination beam forms a barrier against contaminating residual gas molecules, notably hydrocarbon molecules.

REFERENCES:
patent: 3124680 (1964-03-01), Van Dorsten
patent: 3328618 (1967-06-01), Wilson

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