Angular spectrum tailoring in solid immersion microscopy for...

Optics: measuring and testing – Inspection of flaws or impurities

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

07826045

ABSTRACT:
A method and structure for locating a fault in a semiconductor chip. The chip includes a substrate on a dielectric interconnect. A first electrical response image of the chip, which includes a spot representing the fault, is overlayed on a first reflection image for monochromatic light in an optical path from an optical microscope through a SIL/NAIL and into the chip. The index of refraction of the substrate exceeds that of the dielectric interconnect and is equal to that of the SIL/NAIL. A second electrical response image of the chip is overlayed on a second reflection image for the monochromatic light in an optical path in which an optical stop prevents all subcritical angular components of the monochromatic light from being incident on the SIL/NAIL. If the second electrical response image includes or does not include the spot, then the fault is in the substrate or the dielectric interconnect, respectively.

REFERENCES:
patent: 5004307 (1991-04-01), Kino et al.
patent: 5939709 (1999-08-01), Ghislain et al.
patent: 6934024 (2005-08-01), Zhan et al.
patent: 7511280 (2009-03-01), Ward et al.
patent: 7535562 (2009-05-01), Matsui et al.
patent: 2004/0076319 (2004-04-01), Fauver et al.
Karrai et al.; Enhanced reflectivity contrast in confocal solid immersion lens microscopy; Applied Physics Letters, vol. 77, No. 21, Nov. 20, 2000; pp. 3459-3461.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Angular spectrum tailoring in solid immersion microscopy for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Angular spectrum tailoring in solid immersion microscopy for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Angular spectrum tailoring in solid immersion microscopy for... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4190604

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.