Amorphous soft magnetic shielding and keeper for MRAM devices

Details Amorphous soft magnetic shielding and keeper for MRAM devices Amorphous soft magnetic shielding and keeper for MRAM devices

2008-07-29

2008-07-29

Menz, Douglas M (Department: 2891)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257S422000

Reexamination Certificate

active

10943510

ABSTRACT:
An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.

REFERENCES:
patent: 4972285 (1990-11-01), Otomo et al.
patent: 6413788 (2002-07-01), Tuttle

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