Aluminum nitride ceramics, members for use in a system for...

Details Aluminum nitride ceramics, members for use in a system for... Aluminum nitride ceramics, members for use in a system for...

2005-07-19

2005-07-19

Group, Karl (Department: 1755)

Compositions: ceramic

Ceramic compositions

Refractory

C501S096400, C501S098600

Reexamination Certificate

active

06919286

ABSTRACT:
An aluminum nitride ceramic is provided, including 0.5 to 10 weight percent of boron atoms and 0.1 to 2.5 weight percent of carbon atoms. The ceramic has a room temperature volume resistivity not lower than 1×1014Ω·cm, and a volume resistivity at 500° C. of not lower than 1×108Ω·cm. An a-axis lattice constant of the aluminum nitride in the ceramic is not shorter than 3.112 angstrom and a c-axis lattice constant of the aluminum nitride is not shorter than 4.980 angstrom.

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