Alternating phase shift mask inspection using biased...

Details Alternating phase shift mask inspection using biased... Alternating phase shift mask inspection using biased...

2006-10-13

2010-06-22

Chang, Jon (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07742632

ABSTRACT:
An inspection system uses inspection data biased to compensate for mismatches that occur as a result of using an optical lithography system to print an alternating phase shift mask that operates at a wavelength of light that is different from the wavelength of light that an inspection system uses to inspect the mask for defects.

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