4. Data processing: measuring, calibrating, or testing
  5. Measurement system in a specific environment
  6. Quality evaluation

Karen D. Badger

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Alternating phase shift mask inspection using biased...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Mask inspection DNIR placement based on location of tri-tone...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Mask inspection DNIR replacement based on location of...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Mask inspection process accounting for mask writer proximity...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Method and system for reducing particulate contamination in...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2243880

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