4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Forming nonplanar surface

Christopher K. Magg

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Alternating phase shift mask inspection using biased...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Hardmask/barrier layer for dry etching chrome films and...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Hardmask/barrier layer for dry etching chrome films and...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Mask inspection DNIR placement based on location of tri-tone...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Mask inspection DNIR replacement based on location of...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2777386

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