Adhesion layer for Pt on SiO 2

Details Adhesion layer for Pt on SiO 2 Adhesion layer for Pt on SiO 2

2007-09-18

2007-09-18

McNeil, Jennifer (Department: 1775)

Stock material or miscellaneous articles

Composite

Of silicon containing

C428S450000, C428S469000, C428S630000, C428S670000

Reexamination Certificate

active

10408339

ABSTRACT:
Si, Al, Al plus TiN, and IrO2 are used as adhesion layers to prevent peeling of noble metal electrodes, such as Pt, from a silicon dioxide (SiO2) substrate in capacitor structures of memory devices.

REFERENCES:
patent: 5960252 (1999-09-01), Matsuki et al.
patent: 6146906 (2000-11-01), Inoue et al.
patent: 6271083 (2001-08-01), Lou
patent: 6365420 (2002-04-01), Ashida
patent: 6376325 (2002-04-01), Koo
patent: 6501113 (2002-12-01), Tsunemine et al.
patent: 6566220 (2003-05-01), Engelhardt et al.
patent: 6645632 (2003-11-01), Honda et al.
patent: 6645807 (2003-11-01), Tsuzumitani et al.
patent: 6686265 (2004-02-01), Beitel et al.
patent: 6800937 (2004-10-01), Marsh et al.
patent: 2002/0115253 (2002-08-01), Engelhardt et al.
patent: 2002/0151162 (2002-10-01), Beitel et al.
patent: 2003/0047784 (2003-03-01), Joo
patent: 11307736 (1999-11-01), None
patent: 362198 (2002-11-01), None
patent: WO 0129885 (2001-04-01), None
Gniewek, J., et al., “Enhancement of Pt Adhesion Using a Si Underlay,” IBM Technical Disclosure Bulletin, Aug. 1977, vol. 20, No. 3, p. 1009.

Affiliated with

Also associated with

Rating

Adhesion layer for Pt on SiO 2 does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Adhesion layer for Pt on SiO 2, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Adhesion layer for Pt on SiO 2 will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3801697