4. Chucks or sockets
  5. With magnetic or electrostatic means

Brian Neal Caldwell

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Adaptive electrostatic pin chuck

Chucks or sockets – With magnetic or electrostatic means
Reexamination Certificate

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Method of compensating for defective pattern generation data...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Profile ID: LFUS-PAI-P-3046107

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