Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-06-21
2005-06-21
Walke, Amanda (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S913000, C430S914000, C549S005000, C549S006000, C549S013000, C549S029000, C568S019000, C568S027000, C568S028000
Reexamination Certificate
active
06908722
ABSTRACT:
A novel photoacid generator containing a structure of the following formula (I),wherein R is a monovalent organic group with a fluorine content of 50 wt % or less, a nitro group, a cyano group, or a hydrogen atom, and Z1and Z2are individually a fluorine atom or a linear or branched perfluoroalkyl group having 1-10 carbon atoms, is provided. When used in a chemically amplified radiation-sensitive resin composition, the photoacid generator exhibits high transparency, comparatively high combustibility, and no bioaccumulation, and produces an acid exhibiting high acidity, high boiling point, moderately short diffusion length in the resist coating, and low dependency to mask pattern density.
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Ebata Satoshi
Iwasawa Haruo
Nagai Tomoki
Nishimura Yukio
Toneri Tatsuya
DLA Piper Rudnick Gray Cary US LLP
JSR Corporation
Kelber Steven B.
Walke Amanda
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