Absorption current image apparatus in electron microscope

Details Absorption current image apparatus in electron microscope Absorption current image apparatus in electron microscope

2005-05-03

2005-05-03

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S397000, C250S398000, C250S3960ML

Reexamination Certificate

active

06888138

ABSTRACT:
It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.

REFERENCES:
patent: 5430292 (1995-07-01), Honjo et al.
patent: 5557105 (1996-09-01), Honjo et al.
patent: 6657193 (2003-12-01), Dan et al.
K. Yamada et al, “An In-Line Contact and Via Hole Inspection Method Using Electron Beam Compensation Current”, IEDM Technical Digest, 1999, pp., 483-486.

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