4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices
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Lundquist Theodore R.

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Lurio Allen

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Lustiber Paul E.

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Lyons Steven A.

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M'saad Hichem

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Mac Rae Alfred U.

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MacCleary Randall C.

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Machida Yasuhide

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Maciejowski Peter E.

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Madonado Juan R.

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Maeno Syuichi

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Magryta Steven J.

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Makimura Tetsuya

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Manabe Yasuo

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Mangat Pawitter Jit Singh

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Mankos Marian

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Mantovani James

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Mapper Lighography IP B.V.

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Marin Jose Antonio

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Marin Jose-Antonio

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