4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Yasuhide Machida

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Charged particle beam exposure method and charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Exposure data preparation method and exposure method

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1211575

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