4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Hichem M'saad

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Characterizing an electron beam treatment apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Clean process for an electron beam source

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Reduction of hillocks prior to dielectric barrier deposition...

Coating processes – Interior of hollow article coating – Coating by vapor – gas – mist – or smoke
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2980598

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