4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...
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Chang Shuan Yu

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Chartered Semiconductor Manufacturing Pte. Ltd.

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Chen Jie

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Chen Ta-Chin

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Cheng Jerry

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Cheng Meng-Chao

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Chidsey Christopher E. D.

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Chien Ann

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Chinnathambi Selvaraj Palanisamy

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Cho Sung-Dong

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Chou Wen-Chi

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Choutov Dmitri A.

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Chow Waiching

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Collins Kenneth

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Copeland Kyle

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Cowans William W.

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Cox Gerald

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Crapse Merrill D.

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Culakowski Randy

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D&apos;Souza Joseph V.

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