4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Jerry Cheng

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Data processing: database and file management or data structures – Database and file access – Preparing data for information retrieval
Reexamination Certificate

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Dual damascene arrangement for metal interconnection with...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Dual damascene arrangement for metal interconnection with...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Dual damascene arrangement for metal interconnection with...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dual damascene arrangements for metal interconnection with...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-768774

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