4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth from liquid or supercritical state
  6. Having moving solid-liquid-solid region
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Defect reduction by oxidation of silicon

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having moving solid-liquid-solid region
Reexamination Certificate

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Doped semiconductor wafer of float zone pulled semiconductor...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having moving solid-liquid-solid region
Reexamination Certificate

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