4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus
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Reaction vessel

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate

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Regulating cylinder unit in a single-crystal pulling apparatus a

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent

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Rod replenishment system for use in single crystal silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate

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Rotating head for crystal pulling systems

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent

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Rotating head for crystal pulling systems for carrying out the c

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent

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Rotationally-vibrated unidirectional solidification crystal...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate

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