4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus
  6. With means for treating single-crystal
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Growing system for uniformly growing thin film over...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for treating single-crystal
Reexamination Certificate

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Growth of bulk single crystals of aluminum nitride

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for treating single-crystal
Patent

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