Growth of bulk single crystals of aluminum nitride

Details Growth of bulk single crystals of aluminum nitride Growth of bulk single crystals of aluminum nitride

1998-07-07

1999-10-26

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for treating single-crystal

117200, 117900, C30B 3500

Patent

active

059721090

ABSTRACT:
Bulk, low impurity aluminum nitride (AlN) single crystals are grown by sublimation or similar deposition techniques at growth rates greater than 0.5 mm/hr.

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