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Alternative structure to SOI using proton beams

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
Reexamination Certificate

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Ammonia gas passivation on nitride encapsulated devices

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
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Apparatus and method for hydrogenating polysilicon thin film tra

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
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Appliance and method for tempering a plurality of process...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
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Atmospheric pressure plasma enhanced abatement of...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
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