4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. By application of corpuscular or electromagnetic radiation
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Laser annealing for forming shallow source/drain extension...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation
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Laser thermal annealing of high-k gate oxide layers

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation
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