4. Semiconductor device manufacturing: process
  5. Gettering of substrate
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Use of a getter layer to improve metal to metal contact...

Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
Reexamination Certificate

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Use of knocked-on oxygen atoms for reduction of transient...

Semiconductor device manufacturing: process – Gettering of substrate
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Using acoustic energy including two lasers to activate...

Semiconductor device manufacturing: process – Gettering of substrate – By vibrating or impacting
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