Using acoustic energy including two lasers to activate...

Details Using acoustic energy including two lasers to activate... Using acoustic energy including two lasers to activate...

2006-12-26

2006-12-26

Brewster, William M. (Department: 2823)

Semiconductor device manufacturing: process

Gettering of substrate

By vibrating or impacting

C438S514000, C438S530000, C438S675000

Reexamination Certificate

active

07153760

ABSTRACT:
Acoustic energy may be utilized to generate phonons for activating implanted species. As a result, greater activation may be achieved with lower thermal budgets. Higher temperatures utilized in conventional processes may result in damage to semiconductor wafers. In some embodiments, the acoustic energy may be coupled with rapid thermal annealing, laser annealing, or other annealing processes. The acoustic energy may be developed by vibrational sources, laser energy, or other sources.

REFERENCES:
patent: 5634718 (1997-06-01), Martinis et al.
patent: 06077155 (1994-03-01), None
patent: 2003002424 (2003-01-01), None
Winkipedia, Infrared definitinon: http://en.wikipedia.org/wiki/Infrared.
“Laser Diaganostics of Mechanical and Elastic Properties of Silicon and Carbon Films”, Applied Surface Science, 106 (1996) pp. 429-437.
“Intens Ruby-Laser-Induced Acoustic Impulses in Liquids”, E.F. Carome et al., The Journal of the Acoustical Society of America, vol. 40, No. 6, 1966, pp. 1462-1466.

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