4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By implanting or irradiating
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Thermal treatment equipment and method for heat-treating

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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Three-dimensional silicon on oxide device isolation

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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Transistor and method of making the same

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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Type silicon material with enhanced surface mobility

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Patent

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