4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Implanting to form insulator
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Patterned buried insulator

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
Reexamination Certificate

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Patterned SOI by formation and annihilation of buried oxide...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
Reexamination Certificate

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Patterned SOI by formation and annihilation of buried oxide...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
Reexamination Certificate

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