4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Combined with the removal of material by nonchemical means
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Insulated structure of a chip array component and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Combined with the removal of material by nonchemical means
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Interlayer dielectric with a composite dielectric stack

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Combined with the removal of material by nonchemical means
Reexamination Certificate

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