4. Scanning-probe techniques or apparatus; applications of scanning
  5. General aspects of spm probes, their manufacture, or their...
  6. Probe manufacture
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Probe device for a metrology instrument and method of...

Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe manufacture
Reexamination Certificate

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Process for manufacturing probes intended to interact with a...

Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe manufacture
Reexamination Certificate

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