Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe manufacture
Reexamination Certificate
2007-12-18
2010-12-14
Berman, Jack I (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
General aspects of spm probes, their manufacture, or their...
Probe manufacture
C977S902000, C977S943000, C977S947000, C850S007000, C850S052000, C850S055000, C850S056000, C850S057000, C850S058000, C850S059000, C850S062000
Reexamination Certificate
active
07854016
ABSTRACT:
A process manufactures a probe intended to interact with a storage medium of a probe-storage system, wherein a sacrificial layer is deposited on top of a substrate; a hole is formed in the sacrificial layer; a mold layer is deposited; the mold layer is etched via the technique for forming spacers so as to form a mold region delimiting an opening having an area decreasing towards the substrate. Then a stack of conductive layers is deposited on top of the sacrificial layer, the stack is etched so as to form a suspended structure, formed by a pair of supporting arms arranged to form a V, and an interaction tip projecting monolithically from the supporting arms. Then a stiffening structure is formed, of insulating material, and the suspended structure is fixed to a supporting wafer. The substrate, the sacrificial layer, and, last, the mold region are then removed.
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Berman Jack I
Iannucci Robert
Ippolito Rausch Nicole
Jorgenson Lisa K.
Seed IP Law Group PLLC
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