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Low power infrared source assembly for spectrometer

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Patent

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Low temperature infrared source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Patent

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Low vapor pressure, low debris solid target for EUV production

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Low-temperature blackbody radiation source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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LPP EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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LPP EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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LPP EUV light source drive laser system

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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LPP EUV light source drive laser system

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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LPP EUV plasma source material target delivery system

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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LWIR-transmitting windows

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Patent

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