Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-06-29
2008-10-21
Berman, Jack I. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S503100, C250S492200, C250S493100, C378S119000, C372S057000, C372S039000, C372S055000, C372S073000, C372S018000
Reexamination Certificate
active
07439530
ABSTRACT:
An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a first axis; a drive laser redirecting mechanism transferring the drive laser beam from the first path to a second path, the second path having a second axis; an EUV collector optical element having a centrally located aperture; and a focusing mirror in the second path and positioned within the aperture and focusing the drive laser beam onto a plasma initiation site located along the second axis. The apparatus and method may comprise the drive laser beam is produced by a drive laser having a wavelength such that focusing on an EUV target droplet of less than about 100 μm at an effective plasma producing energy if not practical in the constraints of the geometries involved utilizing a focusing lens. The drive laser may comprise a CO2laser. The drive laser redirecting mechanism may comprise a mirror.
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Bykanov Alexander N.
Ershov Alexander I.
Fomenkov Igor V.
Khodykin Oleh
Berman Jack I.
Cray William C.
Cymer Inc.
Logie Michael J
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