4. Radiant energy
  5. Inspection of solids or liquids by charged particles
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Beam as well as method and equipment for specimen fabrication

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Bellows with spring anti-gravity device

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Bi-axial-tilting specimen fine motion device and method of corre

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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