Bi-axial-tilting specimen fine motion device and method of corre

Details Bi-axial-tilting specimen fine motion device and method of corre Bi-axial-tilting specimen fine motion device and method of corre

1995-06-20

1997-01-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044011, H01J 3720

Patent

active

055919804

ABSTRACT:
In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein

REFERENCES:
patent: 4710633 (1987-12-01), Suzuki
patent: 4950909 (1990-08-01), Yokoto et al.
LM1851 Ground Fault Interrupter data sheet, National Semiconductor Application Specific Analog Products Data Book, pp. 4-233 to 4-239 (1995) no month.

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