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Wafer chuck with integrated reference sample

Optics: measuring and testing – Sample – specimen – or standard holder or support
Reexamination Certificate

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Wafer chuck with integrated reference sample

Optics: measuring and testing – Sample – specimen – or standard holder or support
Reexamination Certificate

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Wafer holding and orienting fixture for optical profilometry

Optics: measuring and testing – Sample – specimen – or standard holder or support
Patent

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Wafer test system with integrated calibration

Optics: measuring and testing – Sample – specimen – or standard holder or support
Patent

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Workstation for both manually and automatically controlling the

Optics: measuring and testing – Sample – specimen – or standard holder or support
Patent

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