Wafer test system with integrated calibration

Details Wafer test system with integrated calibration Wafer test system with integrated calibration

1975-06-27

1976-12-28

Corbin, John K.

Optics: measuring and testing

Sample, specimen, or standard holder or support

356161, 356212, 356243, G01N 2122

Patent

active

039998665

ABSTRACT:
A thin flat circular silicon wafer is mounted or supported by a wafer holder mounted on an X-Y table. Motive means drives the table in two different linear directions so as to selectively position different areas of the wafer beneath a test probe. A plurality of wafer chips are also mounted on the table at different positions locatable beneath the test probe. Each of the wafer chips has different characteristics suitable for use in calibrating the test system. The wafer chips are located at predetermined positions relative to a reference position so that the table can be automatically moved during calibration to present the wafer chips to the test probe.

REFERENCES:
patent: 3645626 (1972-02-01), Druschel

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