Wafer holding and orienting fixture for optical profilometry

Details Wafer holding and orienting fixture for optical profilometry Wafer holding and orienting fixture for optical profilometry

1998-03-09

1999-11-16

Rosenberger, Richard A.

Optics: measuring and testing

Sample, specimen, or standard holder or support

350376, G01N 2101, G01B 1124

Patent

active

059867531

ABSTRACT:
An optical profilometer having a movable head for measurement of the profile of a surface of a wafer under test in response to an optical beam projected by the head and incident onto the surface. The wafer may be a substrate for a data storage disc, and the surface may be one of a plurality of surfaces of the wafer, including the side face, the edge, and a radius or bevel therebetween. A fixture for holding the wafer includes a frame for orienting the wafer and also pivotally rotating the wafer about an axis. A vacuum chuck holds the wafer on the frame. An actuator orients the fixture frame in an plurality of positions spaced angularly about the axis to present selected ones of the wafer surfaces to the beam for profile measurement. Wafers of various diameters may be accommodated on the fixture.

REFERENCES:
patent: 5017012 (1991-05-01), Merritt et al.
patent: 5369490 (1994-11-01), Kawai et al.

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