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Micromechanical optical switch

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Micromechanical optical switch

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromechanical optical switch

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromechanical optical switch

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromechanical optical switch

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromechanical optical switch

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromechanical structure, in particular for an acceleration...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microminiature movable device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microminiature, monolithic, variable electrical signal processor

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent

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Micromirror actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror and micromirror device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror and micromirror device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror and post arrangements on substrates

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror and post arrangements on substrates

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror and post arrangements on substrates

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror and products using the same

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror apparatus with improved in-plane rotation tolerance

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Micromirror array

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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