Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-08-22
2006-08-22
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S295000, C359S298000
Reexamination Certificate
active
07095544
ABSTRACT:
A product comprising a micromirror comprising a reflective layer and a treatment layer overlying the reflective layer, and wherein the treatment layer comprises Ti.
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Chang Yuh-Hwa
Huang Hsin-Chieh
Po Ching-Heng
Tzeng Jiann-Tyng
Yeh Chih-Chieh
Lester Evelyn A.
Taiwan Semiconductor Manufacturing Co. Ltd.
Tung & Associates
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