Micromirror actuator

Details Micromirror actuator Micromirror actuator

2005-09-20

2005-09-20

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S198100

Reexamination Certificate

active

06947197

ABSTRACT:
A micromirror actuator having a micromirror, which is operative using an electrostatic force with a low voltage and wherein an electrostatic force opposite to the driving force of the micromirror is blocked, and a method for manufacturing the same, are provided. The micromirror actuator includes a substrate, a trench in which at least one electrode is formed, supporting posts installed at opposite sides of the trench, a torsion bar supported by the supporting posts, and the micromirror including a driving unit which faces the trench when the micromirror is in a horizontal state, and a reflecting unit, which is elastically rotated about the torsion bar, to reflect an optical signal. The actuator also includes a shielding electrode installed to face the reflecting unit when the micromirror is in a horizontal state and to block an electrostatic force occurring between the reflecting unit and the electrode.

REFERENCES:
patent: 6519075 (2003-02-01), Carr et al.
patent: 6791742 (2004-09-01), Staker et al.

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